SEMI S2 Guideline and Standard

The SEMI S2 guideline defines minimum performance-based safety requirements. The scope of these requirements covers potential health and safety hazards such as mechanical, electrical, chemical, ionizing and non-ionizing radiation, seismic, ventilation, environmental and ergonomics. There are many additional SEMI guidelines that are referenced by or otherwise support SEMI S2. A partial list appears below.

 

 

 

S2 Evaluation to SEMI® Guidelines

 

 

Comprised of 20 basic elements:

 

  • Documents Provided to User
  • Hazard Warning Labels
  • Safety Interlock Systems
  • Emergency Shutdown
  • Electrical Design
  • Fire Risk and Protection
  • Heated Chemical Baths
  • Ergonomics and Human Factors
  • Hazardous Energy Isolation
  • Mechanical Design Seismic Protection
  • Automated Material Handlings
  • Environmental Considerations
  • Exhaust Ventilation
  • Chemicals
  • Ionizing Radiation
  • Non-ionizing Radiation and Fields
  • Lasers
  • Sound Pressure Level
  • Manual Review (Installation, Operation, Maintenance)

 

 

Typical SEMI® Equipment Safety Guidelines:

 

  • S1-0308 - Safety Guideline for Equipment Safety Labels
  • S2-03 - Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment
  • S6-0707 - EHS Guideline for Exhaust Ventilation of Semiconductor Manufacturing Equipment
  • S8-0308 - Safety Guidelines for Ergonomics Engineering of Semiconductor Manufacturing Equipment
  • S13-0305 - Environmental, Health and Safety Guideline for Documents Provided to the Equipment User for Use With Semiconductor Manufacturing Equipment
  • S14-0704 - Safety Guidelines for Fire Risk Assessment and Mitigation for Semiconductor Manufacturing Equipment
  • S16-0307 - Guide for Semiconductor Manufacturing Equipment Design for Reduction of Environmental Impact at End of Life Equipment Disposal
  • S17-0701 - Safety Guideline for Unmanned Transport Vehicle (UTV) Systems
  • S19-1102 - Safety Guideline for Training of Semiconductor Manufacturing Equipment Installation, Maintenance and Service Personnel
  • S21-1106E - Safety Guideline for Worker Protection
  • S22-0706a - Safety Guideline for the Electrical Design of Semiconductor Manufacturing Equipment
  • S23-0705 - Guide for Conservation of Energy, Utilities and Materials Used by Semiconductor Manufacturing Equipment