SEMI S2 Guideline and Standard
The SEMI S2 guideline defines minimum performance-based safety requirements. The scope of these requirements covers potential health and safety hazards such as mechanical, electrical, chemical, ionizing and non-ionizing radiation, seismic, ventilation, environmental and ergonomics. There are many additional SEMI guidelines that are referenced by or otherwise support SEMI S2. A partial list appears below.
S2 Evaluation to SEMI® Guidelines
Comprised of 20 basic elements:
- Documents Provided to User
- Hazard Warning Labels
- Safety Interlock Systems
- Emergency Shutdown
- Electrical Design
- Fire Risk and Protection
- Heated Chemical Baths
- Ergonomics and Human Factors
- Hazardous Energy Isolation
- Mechanical Design Seismic Protection
- Automated Material Handlings
- Environmental Considerations
- Exhaust Ventilation
- Chemicals
- Ionizing Radiation
- Non-ionizing Radiation and Fields
- Lasers
- Sound Pressure Level
- Manual Review (Installation, Operation, Maintenance)
Typical SEMI® Equipment Safety Guidelines:
- S1-0308 - Safety Guideline for Equipment Safety Labels
- S2-03 - Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment
- S6-0707 - EHS Guideline for Exhaust Ventilation of Semiconductor Manufacturing Equipment
- S8-0308 - Safety Guidelines for Ergonomics Engineering of Semiconductor Manufacturing Equipment
- S13-0305 - Environmental, Health and Safety Guideline for Documents Provided to the Equipment User for Use With Semiconductor Manufacturing Equipment
- S14-0704 - Safety Guidelines for Fire Risk Assessment and Mitigation for Semiconductor Manufacturing Equipment
- S16-0307 - Guide for Semiconductor Manufacturing Equipment Design for Reduction of Environmental Impact at End of Life Equipment Disposal
- S17-0701 - Safety Guideline for Unmanned Transport Vehicle (UTV) Systems
- S19-1102 - Safety Guideline for Training of Semiconductor Manufacturing Equipment Installation, Maintenance and Service Personnel
- S21-1106E - Safety Guideline for Worker Protection
- S22-0706a - Safety Guideline for the Electrical Design of Semiconductor Manufacturing Equipment
- S23-0705 - Guide for Conservation of Energy, Utilities and Materials Used by Semiconductor Manufacturing Equipment